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Special Session CJ-6
State-of-the-art Development and Application of Thin Film Piezoelectric MEMS/NEMS Advisory Board Invited Lectures With the continuous trend of microelectromechanical systems (MEMS) to scaling down to smaller sizes and increased integration density, new materials approaches are explored to meet the demand for newer and more efficient devices. Piezoelectric ceramics thin films and heterostructures, especially those based on wurtzite and perovskite systems, are being identified as promising options to possibly overcome some limits of electrostatically-actuated micro- and nanomechanical structures, in virtue of their effectiveness in providing the adequate linear forces, fast actuation, high displacements at small drive voltages, high integration capability and low power consumption for the realisation of efficient MEMS/NEMS devices. This Special Session aims at enlightening the state-of-the-art of thin-film piezoelectric MEMS/NEMS, including key materials, growth of piezoelectric thin films and emerging microfabrication techniques for the realisation of highly integrated reliable MEMS/NEMS devices suitable for a broad range of ongoing and prospective applications. Contributions are expected dealing with the following and related topics:
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